Semiconductor integrated device and apparatus for designing the same

ABSTRACT

A semiconductor integrated device includes a plurality of power system circuit units, a first circuit unit to which electric power is supplied from first power supply wiring, and first ground wiring to which the first circuit unit is coupled. Moreover, the semiconductor integrated device includes a second circuit unit to which electric power is supplied from second power supply wiring, and second ground wiring coupled to the second circuit unit. The first circuit unit includes a first interface circuit unit, and the second circuit unit includes a second interface circuit unit configured to perform inputting or outputting of a signal to and from the first interface circuit unit. The first ground wiring is coupled to the second ground wiring through a protection circuit, and the second interface circuit unit is placed in the vicinity of the first interface circuit unit.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.11/444,617, filed Jun. 1, 2006 (now U.S. Pat. No 7,552,404), which is adivisional of U.S. patent application Ser. No. 10/784,620, filed Feb.23, 2004 (now U.S. Pat. No. 7,076,757 issued Jul. 11, 2006), which areboth incorporated herein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor integrated device andan apparatus for designing the same, more specifically, to asemiconductor integrated device including a plurality of circuits to beoperated by a plurality of power supplies and an apparatus for designingthe same.

2. Description of the Prior Art

Along with an increase in cell density of a semiconductor integrateddevice (hereinafter abbreviated as an “LSI”) and advance in the digitaltechnology in recent years, circuits including digital circuits andanalog circuits in single semiconductor devices are embedded in manyproducts. In a digital camera or video equipment, for example, a DAconverter and an AD converter for converting signals between analogsignals and digital signals are embedded as a single semiconductordevice.

Each of the digital circuit and the analog circuit embedded in thesingle semiconductor device is operated by a plurality of differentpower systems. Moreover, when the circuits operated by the plurality ofdifferent power systems are placed on the single semiconductor device,the semiconductor device requires a design in terms of electrostaticdischarge (ESD) designing which is different from the ESD designing fora circuit including a single power system.

In particular, as miniaturization of an LSI progresses, the ESDdesigning in consideration of the miniaturization requires manyprocesses at design and development stages. Accordingly, an increase inthe development period is unignorable.

As described above, in order to prevent damage by electrostaticdischarge in an LSI device including two or more sets of power supplywiring, there are known various aspects of inserting an ESD protectionelement between high-potential power supply wiring and a low-potentialpower supply wiring. A typical technique thereof is disclosed inJapanese Unexamined Patent Publication No. 9(1997)-172146, for example.

An LSI device in this prior art includes first and second power supplylines. Moreover, a high-potential side of the first power supply lineand a high-potential side of the second power supply line are separated;meanwhile, a low-potential side of the first power supply line iscoupled to a low-potential side of the second power supply line througha protection circuit (HK).

In this way, destruction of an element inside a second circuitattributable to a rise in electric potential on the low-potential sideof the first power supply line is prevented. Besides, there are alsoknown a technique to couple a high-potential side of a power system to alow-potential side of a different power system through a protectionelement, a technique to couple a protection element between a signalline of a first power system and a ground line of a second power system,and the like.

However, the present inventor has recognized that the prior part did notconsider nodes of respective circuits on the high-potential side of thepower supply line or on the low-potential side of the power supply line.Accordingly, this prior art causes variation of ESD tolerance and it istherefore difficult to manufacture an LSI with sufficient ESD tolerance.

Moreover, in terms of a circuit chip including an analog function celland a digital circuit using different power supplies, there is alsoknown a technique to insert a level conversion circuit for performinglevel conversion between an input/output signal of an analog functioncircuit and an input/output signal of the digital circuit, which isconfigured to draw in both of the power supply to be supplied to theanalog function cell and the power supply to be supplied to the digitalcircuit. For example, the technique to insert the level conversioncircuit is disclosed in Japanese Unexamined Patent Publication No.10(1998)-150364.

The present inventor has recognized that this technique was a techniqueconcerning optimization of a circuit area and was not designed in lightof improvement in the ESD tolerance. Accordingly, occurrence of wiringresistance or wiring delay is unignorable, and the ESD tolerance isthereby varied.

Therefore, it is an object of the present invention to provide an LSIdevice and an apparatus for designing an LSI device, which are capableof effectively suppressing ESD destruction inside a circuit.

SUMMARY OF THE INVENTION

A semiconductor integrated device according to a first embodiment of thepresent invention, comprising: a first circuit unit to which electricpower is supplied from first power supply wiring; first ground wiring towhich the first circuit unit is coupled; a second circuit unit to whichelectric power is supplied from second power supply wiring; secondground wiring coupled to the second circuit unit; a first interfacecircuit unit formed in the first circuit unit; and a second interfacecircuit unit formed in the second circuit unit, the second interfacecircuit unit being configured to perform any of inputting and outputtinga signal to and from the first interface circuit unit,

wherein the first ground wiring is coupled to the second ground wiring,and the second interface circuit unit is placed in the vicinity of thefirst interface circuit unit. By adopting this configuration, it ispossible to reduce the wiring resistance and thereby to suppress aninfluence of an ESD current.

In addition, a semiconductor integrated device according to a secondembodiment of the present invention, comprising: a first circuit unit towhich electric power is supplied from first power supply wiring; firstground wiring to which the first circuit unit is coupled; a secondcircuit unit to which electric power is supplied from second powersupply wiring; second ground wiring coupled to the second circuit unit;a first interface circuit unit formed in the first circuit unit; and asecond interface circuit unit formed in the second circuit unit, thesecond interface circuit unit being configured to perform any ofinputting and outputting a signal to and from the first interfacecircuit unit, wherein the first ground wiring is coupled to the secondground wiring, and the second interface circuit unit is coupled to thesecond ground wiring in the vicinity of a node for the first groundwiring and the second ground wiring.

Moreover, a semiconductor integrated device according to a thirdembodiment of the present invention, comprising: a first circuit unit towhich electric power is supplied from first power supply wiring; firstground wiring to which the first circuit unit is coupled; a secondcircuit unit to which electric power is supplied from second powersupply wiring; second ground wiring coupled to the second circuit unit;a first interface circuit unit formed in the first circuit unit; and asecond interface circuit unit formed in the second circuit unit, thesecond interface circuit unit being configured to perform any ofinputting and outputting a signal to and from the first interfacecircuit unit, wherein the first ground wiring is coupled to the secondground wiring, and an external connection pad is coupled to the secondground wiring in the vicinity of a node for the first ground wiring andthe second ground wiring.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 depicts a circuit configuration of an LSI device according to afirst embodiment of the present invention.

FIG. 2 depicts an influence of an ESD surge current in the LSI device ofthe first embodiment.

FIG. 3 also depicts the influence of the ESD surge current in the LSIdevice of the first embodiment.

FIG. 4A depicts a circuit configuration of an LSI device according to asecond embodiment of the present invention.

FIG. 4B depicts a circuit configuration of another LSI device accordingto the second embodiment of the present invention.

FIG. 5 depicts a circuit configuration of an LSI device according to athird embodiment of the present invention.

FIG. 6 depicts a circuit configuration of an LSI device according to afourth embodiment of the present invention.

FIG. 7 depicts a circuit configuration of an LSI device according to afifth embodiment of the present invention.

FIG. 8 depicts a logical configuration of an apparatus for designing anLSI device related to the present invention.

FIG. 9 depicts a hardware configuration of the apparatus for designingan LSI device related to the present invention.

FIG. 10 is a flowchart which depicts an element/circuit specificationprocessing flow in the apparatus for designing an LSI device related tothe present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

The invention will be now described herein with reference toillustrative embodiments. Those skilled in the art will recognize thatmany alternative embodiments can be accomplished using the teachings ofthe present invention and that the invention is not limited to theembodiments illustrated for explanatory purposes.

Firstly, embodiments of an LSI device of the present invention will bedescribed in detail with reference to the accompanying drawings.

In the respective drawings, elements designated by the same referencenumerals denote the same elements, and duplicate explanations will beomitted as appropriate. The following description is provided forexplaining the embodiments of the present invention and it is to benoted that the present invention shall not be limited only by thefollowing embodiments. For the purpose of clarification of theexplanations, the following description will be abridged or simplifiedwhen appropriate. Moreover, for those skilled in the art, it is easilypossible to modify, add, and/or substitute the respective elements inthe following embodiments within the scope of the present invention.

First Embodiment

FIG. 1 is a block diagram for describing a schematic circuitconfiguration of an LSI device according to a first embodiment. Withreference to FIG. 1, the LSI device of the first embodiment includes afirst power system circuit unit 101 which is operated by electric powersupplied from a first power system, and a second power system circuitunit 102 which is operated by electric power supplied from a secondpower system.

Typical examples of the first power system circuit unit and the secondpower system circuit unit are a digital circuit unit and an analogcircuit unit to be placed in an LSI chip. Other examples may include anLSI device configured to use different power systems between a digitalinternal circuit and an input/output interface circuit unit.

Moreover, the digital circuit unit, for instance, has a larger number ofelements than the analog circuit unit, and the digital circuit unit,also, has a larger chip area than the analog circuit unit.

In a hybrid circuit configured to incorporate the digital circuit unitand the analog circuit unit into a one-chip LSI device, a power pad anda ground pad of the analog circuit unit are provided differently from apower pad and a ground pad of the digital circuit unit so as to suppressdeterioration in characteristics of the analog circuit attributable tonoise components generated in the digital circuit unit. Moreover, acircuit inside the digital circuit unit and a circuit inside the analogcircuit unit include different power supply wiring and ground wiring,whereby the digital circuit unit and the analog circuit unit areoperated as different power systems.

The circuit configuration of FIG. 1 will be now described. The firstpower supply system circuit unit 101 of the LSI device according to thefirst embodiment includes a first power supply system internal circuitunit 103 in which signal exchanges are carried out among the elementsthat are supplied the electric power by the first power supply, and afirst power supply system input/output circuit unit 104 in which signalexchanges are carried out among the elements that are supplied theelectric power by the second power supply.

The LSI device of the first embodiment includes a first power systempower pad 105 to which a first power voltage (VDD1) is supplied from apower supply arranged outside the circuit, and first power system powersupply wiring 106 coupled to the first power system power pad 105 fortransmitting the power voltage to be supplied from the first powersystem power pad 105.

The first power system internal circuit 103 and the first power systeminput/output circuit 104 are coupled to the first power system powersupply wiring 106, and the necessary electric power is supplied thereto.The LSI device according to the first embodiment further includes firstpower system ground pads (107 and 108) coupled to a ground circuit unitoutside the circuit and provided with ground potential (GND1).

In other words, the first power system circuit unit 101 of thisembodiment includes the two ground pads.

The LSI device according to the first embodiment further includes firstpower system ground wiring 109 coupled to the first power system groundpads 107 and 108 and configured to provide the ground potential to thefirst power system circuit unit 101. The first power system internalcircuit 103 and the first power system input/output circuit 104 arecoupled to the first power system ground wiring 109, whereby thenecessary 1D ground potential is supplied thereto.

The second power supply system circuit unit 102 includes a second powersystem internal circuit unit 110 in which signal exchanges are carriedout among the elements that are supplied the electric power by thesecond power supply, and a second power supply system input/outputcircuit unit 111 in which signal exchanges are carried out among theelements that are supplied the electric power by the first power supply.

Moreover, the LSI device of the first embodiment includes a second powersystem power pad 112 to which a second power voltage (VDD2) is suppliedfrom a power supply arranged outside the circuit, and second powersystem power supply wiring 113 coupled to the second power system powerpad 112 for transmitting the power voltage to be supplied from thesecond power system power pad 112.

Each of the first power system input/output circuit and the second powersystem input/output circuit is an example of an interface circuit. Theinterface circuit includes a circuit configured to perform any one ofinput and output, or a circuit configured to perform both input andoutput.

The second power system internal circuit 110 and the second power systeminput/output circuit 111 are coupled to the second power system powersupply wiring 113, and the necessary electric power is supplied thereto.Second power system ground pads (114 and 115) are coupled to a groundcircuit unit outside the circuit and provided with ground potential(GND2). The second power system of this embodiment includes the twoground pads. Second power system ground wiring 116 for providing theground potential to the second power system circuit 102 is coupled tothe second power system ground pads 114 and 115.

The second power system internal circuit 110 and the second power systeminput/output circuit 111 are coupled to the second power system groundwiring 116, whereby the necessary ground potential is supplied thereto.

The first power system ground wiring 109 is coupled to the second powersystem ground wiring 116 through an electrostatic discharge (ESD)protection element 117. The protection element 117 includes a functionto conduct the two sets of ground wiring and to flow an electric currenttherebetween when electric potential between the sets of the groundwiring reaches a predetermined value. The ESD protection element 117 ispreferably bidirectional, and a transistor, a bidirectional diode or thelike can be used.

Here, the protection element 117 can be used when the element isnecessary according to the circuit design. The protection element 117 isparticularly useful for suppressing unfavorable interactions between theanalog circuit and the digital circuit, for example, when digital noisesare likely to affect the analog circuit. When the protection element isnot necessary, the first power system ground wiring can be coupled tothe second power system ground wiring through a node where no particularelement is placed. Such a node only needs to be a point in a circuit andis not limited to a point which is visually recognizable.

Moreover, the values of the electric potential on the two power systemmay be either different or identical. Whereas the ground potential isset to a value lower than the power supply potential, those potentialvalues are appropriately determined by designing. The values of theground potential to be provided to the two power system may be eitheridentical or different in accordance with the circuit design. Moreover,although it is not shown in FIG. 1, the first power system power supplywiring 106 can be coupled to the first power system ground wiring 109through a power supply protection circuit. Similarly, the second powersystem power supply wiring 113 can be coupled to the second power systemground wiring 116 through a power supply protection circuit. The aspectsdescribed above will also apply to other embodiments to be describedlater.

An influence by an ESD surge from outside which can cause electrostaticdestruction of an LSI chip will be described with reference to FIG. 2.An LSI chip can incur electrostatic destruction by an ESD surge which isinputted from outside through a pad. To describe the electrostaticdestruction caused by the ESD surge from the outside, description willbe made below concerning electric potential inside the circuit when anESD surge current flows from the first power system power pad to thesecond power system ground pad.

Description will be now made on the case when the ESD surge currentflows from the first power system power pad to the second power systemground pad in the LSI of this embodiment. One of factors for theelectrostatic destruction of the LSI is destruction of a gate oxide filmof a MOS transistor. In the LSI device including the circuits in thedifferent power systems, MOS transistors in the input/output circuitunits between the circuits units in the different power systems; moreparticularly, destruction of a gate oxide film of the MOS transistor onthe input side becomes a problem.

FIG. 2 is a circuit diagram for explaining the influence by the ESDsurge current in this embodiment. Here, a simplified circuit isdescribed for the purpose of clarifying the explanation.

With reference to FIG. 2, the elements designated by the same referencenumerals as those in FIG. 1 are similar to the elements described inFIG. 1, and duplicate explanations will be omitted herein.

In FIG. 2, the first power system input/output circuit is defined as anoutput side, and the second power system input/output circuit is definedas an input side. Note that the input/output circuit corresponds to afinal stage of a primitive block inside the LSI circuit, and istherefore different from an input/output circuit unit outside the LSI. Apower supply protection circuit 201 is coupled between the first powersystem power supply wiring and the first power system ground wiring, anda power supply protection circuit 202 is coupled between the secondpower system power supply wiring and the second power system groundwiring. An output inverter 203 contained in the first power systeminput/output circuit unit 104 is a CMOS circuit which includes a PMOS tobe coupled to the first power system power supply wiring 106 and an NMOSto be coupled to the first power system ground wiring 109. An inputinverter 204 contained in the second power system input/output circuitunit 111 is a CMOS circuit which includes a PMOS to be coupled to thesecond power system power supply wiring 113 and an NMOS to be coupled tothe second power system ground wiring 116. Signal wiring 205 couples theCMOS in the first power system to the CMOS in the second power system.

An applied potential difference between a gate and a source of the NMOStransistor in the second power system is defined as Vgs, and an appliedpotential difference between a source and drain of the PMOS transistorin the first power system is defined as Vpmos. Moreover, a clamp voltageof the power supply protection circuit 201 in the first power system isdefined as Vpower, and a clamp voltage by the protection element 117between the sets of the ground wiring in the first and second powersystems is defined as Vdiode. Meanwhile, resistance of the first powersystem ground wiring from the first power system power supply protectioncircuit 201 to the first power system output inverter 203 is defined asRGND1, and resistance of the first power system ground wiring from thefirst power system output inverter 203 to the protection element 117placed between the sets of the ground wiring is defined as RGND1D.Furthermore, resistance of the second power system ground wiring fromthe protection element 117 placed between the sets of the ground wiringto the second power system input inverter 204 is defined as RGND2, andresistance of the second power system ground wiring from the secondpower system input inverter 204 to a GND pad 2 is defined as RGND2D.

When an ESD surge current is applied between the first power systempower pad 105 and the second power system ground pad 114, the firstpower system power supply protection circuit 201 is turned on and theESD surge current (Iesd) flows thereon. Examination will be made belowon the case where the ESD surge current flows on the following path ofthe first power system power pad 105→the first power system power supplyprotection circuit 201→the first power system ground wiring 109→theprotection element 117 between the set of the ground wiring→the secondpower system ground wiring 116→the second power system ground pad 114.

When the ESD surge is applied, a potential difference is generatedinside the chip because of a voltage drop attributable to the wiringresistance existing on the path of the flow of the ESD surge current.When the ESD surge is applied between the first power system power pad105 and the second power system ground pad 114, the voltage Vgs to beapplied between the gate and the source of the NMOS of the second powersystem is calculated by:Vgs=(Vpower+RGND1*Iesd+RGND1D*Iesd+Vdiode+RGND2D*Iesd)−Vpmos

A breakdown voltage of the applied potential difference (Vgs) of theNMOS transistor is defined as Vgs.max. To protect the NMOS fromdestruction due tot the breakdown voltage of the applied potentialdifference (Vgs) of the NMOS transistor, it is necessary to design theLSI such that the voltage Vgs does not exceed the breakdown voltageVgs.max.

In the 130-nm class CMOS process, the thickness of the gate oxide filmof the MOS transistor is about Tox=2 nm. Typically, destruction of thegate oxide film occurs when a potential difference of about 6 V isapplied to the gate oxide film. When an ESD surge at 2000 V is appliedin accordance with the human body model (HBM) standard, the peak of theESD surge current Iesd is equal to 1.3 A. To pass an ESD tolerance testat 2000 V in accordance with the HBM standard, it is necessary to designthe LSI such that the voltage Vgs does not exceed 6 V even if this ESDsurge current flows inside the LSI.

For example, when the clamp voltage Vpower of the power supplyprotection circuit is equal to 3.5 V, the clamp voltage Vdiode of aprotection diode between the sets of the ground wiring is equal to 1.2V, and the voltage Vpmos between the source and the drain of the PMOS ofthe output inverter is equal to 0 V, the ground wiring resistance needsto satisfy:RGND1+RGND1D+RGND2D≦(6 V−3.5 V−1.2 V)/1.3A=1.0ΩAs described above, when the ESD surge is applied, one of criticalelements is to reduce the ground wiring resistance in the path forflowing the ESD surge current.

Next, the circuit configuration will be now described in a case whichthe ground wiring GND1 is directly coupled to the ground wiring GND2without the protection device 117. In this case, a connection nodebetween the ground wiring GND1 and the ground wiring GND2 is consideredas a parasitic resistance. The value of the parasitic resistance isdefined as RGND12, the voltage Vgs to be applied between the gate andthe source of the NMOS of the second power system is calculated by:Vgs=(Vpower+RGND1*Iesd+RGND1D*Iesd+RGND12*Iesd+RGND2D*Iesd)−Vpmos

As described with reference to FIG. 2, one aspect of the electrostaticdestruction of the LSI chip is incurred by the ESD surge between thepower pad and the ground pad in the mutually different power systems.Besides this aspect, the electrostatic destruction of the LSI chip maybe incurred by emission of electric charges on the chip from the pad. Acharged device model (CDM) test is a test concerning the electrostaticdestruction of this type. The CDM test is a test for measuring the ESDtolerance of the LSI by means of short circuiting a measurement pin andan external GND in a state where electric charges are accumulated in theentire LSI chip.

Next, a discharging operation of the electric charges accumulated in thechip will be described with reference to FIG. 3. A circuit configurationshown in FIG. 3 is similar to the circuit in FIG. 2 except principalstray capacitors (CVDD1, CVDD1I, CVDD2I, CVDD2, CSO, CSI, CGND1, CGND1I,CGND1D, CGND2D, CGND2I, CGND2) which are additionally described therein,and the detailed description is therefore omitted.

Each of the principal stray capacitors is a stray capacitor providedbetween a substrate and any of the power supply wiring, the groundwiring, the signal wiring, and a diffusion layer. The electric chargesaccumulated in these stray capacitors are discharged from externalconnection pads. Description will be now made on a state inside the chipwhen the first power system power pad and the external GND are shortcircuited in the state where the electric charges are accumulated andthen the electric charges accumulated inside the LSI chip are therebydischarged.

An electric current generated by movement of the electric chargesaccumulated in the first power system ground wiring 109 and the secondpower system ground wiring 116 is defined as Icdmg, an electric currentgenerated by movement of the electric charged while being accumulated inthe signal wiring 205 between the output inverter and the input inverteris defined as Icdms, and a resistance component of the first powersystem power supply wiring is defined as RVDD1. Upon the discharge, thevoltage Vgs between the gate and the source of the NMOS of the inputinverter 204 is calculated by:Vgs=(Vpower+RGND1*Icdmg+RGND1D*Icdmg+Vdiode+RGND2D*Icdmg)−(Rs*Icdms+Vpmos+RVDD1*Icdms)

When there is a large difference between the signal wiring resistanceand the ground wiring resistance, or a large difference between thesignal wiring resistance and the power supply wiring resistance, thevoltage Vgs is increased by generation of a time difference between theelectric currents Icdmg and Icdms and the gate oxide film is therebydestroyed. Since the power supply wiring resistance and the groundwiring resistance are normally small, it is important to reduce thesignal wiring resistance RS in order to prevent the destruction of thegate oxide film by the CDM.

The circuit configuration of the LSI of this embodiment will bedescribed in detail with reference to FIG. 1. In the LSI of thisembodiment, the first power system input/output circuit 104 and thesecond power system input/output circuit 111 are placed closely to eachother. It is more preferable that the first power system input/outputcircuit 104 and the second power system input/output circuit 111 areplaced so as to contact each other at a boundary between the first powersystem circuit 101 and the second power system circuit 102. It ispossible to reduce the ground wiring resistance by arranging the firstpower system input/output circuit 104 closely to the second power systeminput/output circuit 111.

With reference to FIG. 2, it is possible to reduce the ground wiringresistance values of RGND1D and RGND2D. Accordingly, it is possible toreduce the MOS gate potential attributable to the ESD surge and therebyto suppress the destruction of the gate oxide film. Otherwise, since itis possible to reduce the signal wiring resistance RS, it is thereforepossible to suppress delay in electric current between the ground wiringand the signal wiring upon the discharge of the accumulated capacitance.

The delay between the input/output circuits in the first power systemand the second power system is formed small in light of the ESD. Thewiring delay can be realized by shortening a wiring length, increasing awiring width, or reducing the wiring resistance. By suppressing thewiring delay, it is possible to suppress the destruction of the gateinsulating film attributable to the time difference in the ESD dischargecurrents.

The first and second input/output circuit units 104 and 111 arerespectively coupled to the relevant ground wiring in the vicinity ofthe protection element 117 between the sets of the ground wiring. Inthis way, it is possible to reduce the ground wiring resistance in theESD surge current path. With reference to FIG. 2, it is possible toreduce the ground wiring resistance values of RGND1D and RGND2D.

The respective ground pads 108 and 115 in the first and second powersystem are coupled to the vicinity of the protection element 117 betweenthe sets of the ground wiring. The ground pad 115 in the second powersystem is preferably coupled to the second power system ground wiring116 at a node 118 located between the protection element 117 and a node119 for the second power system input/output circuit and the secondpower system ground wiring. The ESD surge current path bypassing theinput/output circuit unit is formed by connecting the ground pad moreclosely to the protection element than the input/output circuit unit,and it is possible to suppress an influence by the ESD surge to theinput/output circuit unit (or the gate voltage Vgs inside the circuitunit). Similarly, the ground pad 108 in the first power system iscoupled to the first power system ground wiring 109 at a node 120located between the protection element 117 and a node 121 for the firstpower system input/output circuit and the first power system groundwiring.

As described above, according to this embodiment, when there are theplurality of power systems inside the LSI chip, it is possible tosuppress the resistance values the resistors being parasitic on thepower supply lines and thereby to prevent destruction of the elementsinside the chip. Moreover, it is possible to prevent the ESD destructionof the elements inside the chip without depending on the circuitconfiguration of the inside of the LSI and thereby to obtain the highESD tolerance stably.

Second Embodiment

FIG. 4A is a circuit diagram showing a schematic configuration of an LSIaccording to a second embodiment of the present invention. The LSI ofthis embodiment includes a digital circuit as a first power systemcircuit, and an analog circuit as a second power system circuit. Part ofthe analog circuit is designed as an analog macro, and the analog macrocontains a first power system input/output circuit to be operated by afirst power supply.

In FIG. 4A, the LSI of this embodiment includes a digital circuit unit401 and an analog macro 402. The analog macro 402 includes an analoginternal circuit 403 and an input/output circuit unit 404.

FIG. 4B is a circuit diagram showing a detailed configuration of theinput/output circuit unit 404 of the analog macro. The input/outputcircuit unit 404 includes a first power system input/output circuit unit405 and a second power system input/output circuit unit 406. In FIG. 4B,the input/output circuit unit 404 of the analog macro includes a firstpower system output inverter 407, a first power system input inverter408, a second power system output inverter 409, a second power systeminput inverter 410, and a gate protection element 411.

The gate protection element 411 is formed of an NMOS transistor which iscoupled to a gate for receiving an input signal of the first powersystem input inverter 408 and to the first power system ground wiring109. When a high voltage is generated, the gate protection element 411clamps electric potential between a gate and a source of the inputinverter to clamp potential. Accordingly, it is possible to suppressdestruction of a gate insulating film by maintaining the electricpotential between the gate and the source of the input inverter withinthe clamp potential. Various widely known elements can be used as such aclamp element.

Similarly, a gate protection element 412 is coupled between a gate forreceiving an input signal of the second power system input inverter 410and the second power system ground wiring 116. The clamp element can bealso coupled between the gate for receiving the input signal of theinput inverter and the power supply wiring. For example, the clampelement is coupled between the gate for receiving the input signal ofthe second power system input inverter 410 and the second power systempower supply wiring 113. An output of the first power system outputinverter is coupled to the second power system input inverter withconnection wiring, and an output of the second power system outputinverter is coupled to the first power system input inverter withconnection wiring.

By arranging the first power system input/output circuit unit and thesecond power system input/output unit inside the analog macro, it ispossible to design a countermeasure for the ESD inside the analog macro.That is, ESD designing in LSI chip layout designing is facilitated andthe ESD designing in digital circuit designing can be curtailed.

Moreover, by arranging the two input/output circuit units inside theanalog macro, the first power system input/output circuit unit and thesecond power system input/output circuit unit are placed at a boundarybetween the first power system circuit unit and the second power systemcircuit unit so as to prevent the electrostatic destruction. In thisway, it is easier to design placement in a vicinity region.

As described above, according to this embodiment, it is possible toprevent the ESD destruction inside the chip, to achieve a connectioncell to realize the LSI having high ESD tolerance in a small area, andto perform automated designing when separating the power supply of thehard macro designed by another company with another power supply insidethe chip.

Third Embodiment

Next, a third embodiment according to the present invention will bedescribed with reference to FIG. 5. FIG. 5 is a circuit diagram showinga schematic configuration of an LSI device of this embodiment. Asdescribed in FIG. 5, the LSI device of this embodiment includes aprotection element 501 between VDD1 and GND1 which is coupled betweenthe first power system power supply wiring 106 and the first powersystem ground wiring 109, and a protection element 502 between VDD2 andGND2 which is coupled between the second power system power supplywiring 113 and the second power system ground wiring 116.

In general, the power supply protection element clamps the electricpotential between the power supply and the ground to the clamp potentialupon application of the ESD if the potential difference between thepower supply and the ground reaches or exceeds the clamp potential.Various widely known elements, such as a clamp element applying atransistor, can be used as the protection elements.

The protection element 501 between VDD1 and GND1 is coupled to the firstpower system ground wiring 109 at a node 503. The node 503 is placed inthe vicinity of the protection element 117 between the sets of theground wiring. In this way, it is possible to reduce the ground wiringresistance between the node and the protection element 117 so as tocontribute to reduction in the ground wiring resistance of the ESD surgecurrent.

Preferably, the node 503 is placed between the node 121 for the firstpower system input/output circuit unit and the first power system groundwiring, and, the protection element 117 between the sets of the groundwiring. By forming a bypass of the ESD current path with respect to thenode of the input/output circuit, it is possible to suppress theinfluence to the input/output circuit by the ESD surge current.

Similarly, the protection element 502 between VDD2 and GND2 is coupledto the second power system ground wiring 116 at a node 504. The node 504is placed in the vicinity of the protection element 117 between the setsof the ground wiring. Preferably, the node 504 is placed closer to theprotection element 117 between the sets of the ground wiring than thenode 119 for the second power system input/output circuit unit and thesecond power system ground wiring. The protection element 501 betweenVDD1 and GND1, the protection element 502 between VDD2 and GND2, and theprotection element 117 between the sets of the ground wiring are formedwithin one cell. In this way, it is easy to perform the ESD designing byarranging one pre-designed cell at a boundary of the circuits to beoperated by different power systems.

Fourth Embodiment

Next, a fourth embodiment according to the present invention will bedescribed with reference to FIG. 6. FIG. 6 is a circuit diagram showinga schematic configuration of an LSI device of this embodiment. In theLSI device of this embodiment, the ESD protection elements are providedbetween the power supplies and the grounds in mutually different powersystems. As described in FIG. 6, the LSI device according to the fourthembodiment of the present invention includes a protection element 601between VDD1 and GND2 which is coupled between the first power systempower supply wiring 106 and the second power system ground wiring 116,and a protection element 602 between VDD2 and GND1 which is coupledbetween the second power system power supply wiring 113 and the firstpower system ground wiring 109.

A node 603 for the protection element 601 between VDD1 and GND2 and theground wiring 116 is coupled to a position farther than the node 119 forthe second power system input/output circuit unit and the second powersystem ground wiring when viewed from the protection element 117 side.The node 603 is placed between the node 119 and the second power systemground pad 114. A node 604 for the protection element between VDD2 andGND1 and the ground wiring is coupled between the node 121 for the firstpower system input/output circuit unit and the first power system groundwiring, and the first power system ground pad 107.

Consideration is made on the ESD surge current path to be formed fromthe first power system power pad VDD1 to the second power system groundpad GND2 by coupling the first power system power supply wiring to thesecond power system ground wiring through the protection element. Thenode 603 for the protection element 601 between VDD1 and GND2 and theground wiring 116 is placed closer to the ground pad 114 than the node119 for the first power system input/output circuit unit and the firstpower system ground wiring. Accordingly, the ESD surge current pathbypassing the node for the second power system input/output circuit unitand the ground wiring is formed, and the influence to the second powersystem input/output circuit unit by the ESD surge current can be therebysuppressed. Similarly, regarding connection between the second powersystem power supply wiring 113 and the first power system ground wiring109 through the protection element 602 between VDD2 and GND1, it ispossible to suppress the influence to the first power systeminput/output circuit unit concerning the ESD surge current path startingfrom the second power system power pad.

Each of the protection element 601 between VDD1 and GND2, the protectionelement 602 between VDD2 and GND1, and the protection element 117between the sets of the ground wiring can be formed in one cell. It iseasy to perform the ESD designing by arranging one pre-designed cell ata boundary of the circuits to be operated by different power systems.

Fifth Embodiment

Next, a fifth embodiment according to the present invention will bedescribed with reference to FIG. 7. FIG. 7 is a circuit diagram showinga schematic configuration of an LSI device of this embodiment. In theLSI device of this embodiment, the ESD protection elements are providedbetween the power supplies and the grounds mutually in the same powersystems. As described in FIG. 7, the LSI device according to the fifthembodiment of the present invention includes a protection element 701between VDD1 and GND1 which is coupled between the first power systempower supply wiring 106 and the first power system ground wiring 109,and a protection element 702 between VDD2 and GND2 which is coupledbetween the second power system power supply wiring 113 and the secondpower system ground wiring 116. The elements to be used as theprotection elements are similar to those used in the fourth embodiment.

A node 703 for the protection element 701 between VDD1 and GND1 and thefirst power system power supply wiring 106 is coupled between the firstpower system power pad 105 and a node 704 for the first power systeminput/output circuit 104 and the first power system power supply wiring106. By coupling the protection element 701 between VDD1 and GND1 in aposition closer to the first power system power pad than a node 704 forthe first power system input/output circuit unit, it is possible to formthe ESD surge current path bypassing the node for the first power systeminput/output circuit unit. The ESD surge current path starting from thefirst power system power pad passes through the protection element 701between VDD1 and GND1 and flows to the first power system ground wiring109.

Therefore, unlike the circuit described with reference to FIG. 5, theESD surge current path flowing from the first power pad VDD1 to thefirst power system ground wiring through the protection element 701between VDD1 and GND1 bypasses the node for the first power systeminput/output circuit. In this way, it is possible to suppress theinfluence to the first power system input/output circuit unit by the ESDsurge current.

Regarding connection between the second power system power supply wiringand the second power system ground wiring as well, a node 705 for theprotection element 702 between VDD2 and GND2 and the second power systempower supply wiring 113 is coupled between the second power system powerpad 112 and a node 706 for the second power system input/output circuit111 and the second power system power supply wiring 113. In this way,the ESD surge current path bypassing the node for the second powersystem input/output circuit unit is formed. Accordingly, it is possibleto suppress the influence to the second power system input/outputcircuit unit by the ESD surge current.

Concerning the protection element 601 between VDD1 and GND2 described inFIG. 6, it is also preferable that the node for the first power systempower supply wiring is located closer to the power pad than the firstpower system input/output circuit unit. Concerning the protectionelement 602 between VDD2 and GND1 as well, it is preferable that thenode for the second power system power supply wiring is located betweenthe node for the second power system input/output circuit, and, thepower pad. In this way, it is possible to form the ESD surge currentpath bypassing the node for the input/output circuit.

Now, a technique related to the present invention will be described withreference to FIG. 8. That is, description will be made below on adesigning apparatus applying a method of designing an LSI deviceaccording to the present invention.

The circuit configurations of the LSI chips capable of obtaining highESD tolerance have been described in the first to fifth embodiments. Toobtain these circuit configurations, it is necessary to performdesigning in consideration of the ESD tolerance in the step of designingthe LSI chips.

One of the reasons is that the circuit configuration is formed inadvance so as to reduce the resistance on the path for flowing the ESDsurge current for the layout designing of the LSI device. In this way,it is possible to perform automated layout designing of the LSI havingthe high ESD tolerance regardless of the internal circuit configurationof the LSI.

Moreover, it is possible to design the LSI chip with the high ESDtolerance by the automated layout designing so as to allow the ESD surgecurrent path to bypass the node for the input/output circuit unit. Todesign the LSI device according to the present invention, it isnecessary to find a position where the ESD tolerance is low.

In the circuit including the plurality of power systems, it is necessaryto find the input/output circuit unit which exchanges signals betweenthe different power systems. In particular, it is important to find atransistor to which signals are inputted from the different powersystems.

FIG. 8 is a constitutional view showing logic of an apparatus fordesigning an LSI device. With reference to FIG. 8, an LSI devicedesigning apparatus 800 includes a cell library 801 for storingwide-ranging information concerning many cells, such as shapes of thecells or pin placements.

Moreover, the LSI device designing apparatus 800 includes a placementdesigning unit 803, which generates circuit data 805 for laying out thecells by use of placement rule information 802 preset in terms of thecell placements and inputted circuit data 804. The placement designingunit 803 generates the circuit data 805, which is preset in terms of thecell placements, based on the cell library and the placement ruleprepared in advance. The placement designing unit 803 includes anelement/circuit specification unit and a placement designing processingunit 807.

The element/circuit specification unit 806 includes a function to detecteither an input/output circuit unit for exchanging signals between thedifferent power systems or a specific circuit in the input/outputcircuit unit based on the circuit data 804 and the cell data. In theplacement designing of the entire circuit, the placement designingprocessing unit 807 can place the specified input/output circuit unit inaccordance with the predetermined placement rule 802.

Next, the processing of the element/circuit specification unit 806 inthe layout designing by the LSI device designing apparatus 800 will bedescribed with reference to FIG. 10. One of the processing for findingthe transistor to which the signals are inputted from the differentpower systems may include the following processing flow.

Firstly, the transistor circuit data 804 subject to layout designing areobtained (Step S11). In the circuit data, regarding an element includingat least one terminal coupled to a power terminal, connectioninformation is modified such that other terminals not have been coupledto the power supply are coupled to the power supply as well, oralternatively, such that the element is short circuited (Step S12).

For example, regarding a MOS transistor in which a source out of drain,gate, source, and back gate thereof is coupled to the power terminal,the drain, gate, and back gate are also coupled to the power supply.Here, instead of short circuiting the element by modifying theconnection information, it is also possible to prepare a cell which isshort circuited in advance and replace the original element with thecell.

Next, certain names are provided to positions corresponding to the powerpads (Step S13). In this event, different names are provided todifferent power pads. Lastly, a node where the terminals with thedifferent names are short circuited is found out (Step S14).

This node is specified as the element to which the signals are inputtedfrom the different power systems. When the node to which the signals areinputted from the different power systems is specified, the input/outputcircuit unit for exchanging the signals between the different powersystems is specified (Step S15).

When the element and the input/output circuit-unit are specified, thelayout designing is executed by the placement designing processing unit807 based on the predetermined placement rule 802 so as to realize anyof the circuit configurations which are described in the first to fifthembodiments.

For example, the input/output circuit units of the different powersystems are designed to be placed in a vicinity area and placed at theboundary between the different power systems. Alternatively, ESD wiringdelay between an input circuit and an output circuit is designed to bereduced. The ESD wiring delay can be reduced by reducing a wiring lengthor by designing to reduce an increase in wiring width or to reduceresistance.

The circuit designing is performed similarly in the respective aspectsof connection described above concerning the power supply wiring, theground wiring, and the protection elements, based on a rule which isexpressly indicated as the designing rule concerning the ESD. Meanwhile,it is possible to perform designing so as to add a cell including aclamp element as a protection element for preventing destruction of thegate insulating film, or to replace the original element with such acell, by means of specifying the MOS transistor to which the signals areinputted from the different power systems.

FIG. 9 shows one example of a hardware configuration of a designingapparatus 900 of the above-described related technique. The function ofthe designing apparatus 900 is achieved in combination of: a computerwhich includes a CPU 910, a ROM 920, a RAM 930, a hard disk drive 940,and a CD-ROM drive 950 as an external storage device and a program to beexecuted on the computer. The cell library 801 and the placement rule802 can be stored in the hard disk 940 in advance. The program forachieving the function as the designing device can cause the computer tofunction as the element/circuit specification unit 806, the placementdesigning processing unit 807, a cell library storage unit, and aplacement rule storage unit. The program or necessary data can berecorded on various recording media including a flexible disk, a CD-ROM,an optical disk, a magnetooptical disk, a tape medium, and the like.

As described above, according to this embodiment, it is possible toprovide the designing apparatus capable of easily designing the LSIwhich achieves the high ESD tolerance. In particular, it is possible toprovide the designing apparatus capable of performing the automatedlayout designing of the LSI having the high ESD tolerance.Alternatively, it is possible to eliminate restrictions upon theautomated designing by forming a device for reducing the resistance ofthe path for flowing the ESD surge current in advance.

That is, according to the present invention, it is possible to obtainthe LSI which achieves the high ESD tolerance.

It is apparent that the present invention is not limited to the aboveembodiments, but may be modified and changed without departing from thescope and spirit of the invention.

1. A method for designing a semiconductor integrated device comprisingthe steps of: modifying connection information by using a computer so asto short circuit a first element having a connection terminal coupled tofirst power supply wiring; modifying the connection information so as toshort circuit a second element having a connection terminal coupled tosecond power supply wiring; providing different names respectively todifferent power pads in the first power supply wiring and the secondpower supply wiring; determining a node where terminals provided withthe different names are short circuited; specifying the node as anelement to which signals are inputted from the first power supply wiringand the second power supply wiring; specifying an input/output circuitunit for exchanging the signals between the first power supply wiringand the second power supply wiring; and performing predetermined elementmodification concerning the specified node and the input/output circuitunit according to a predetermined placement rule that allows anelectrostatic discharge surge current path to bypass the specified nodeand the input/output circuit unit.
 2. The method for designing asemiconductor integrated device according to claim 1, wherein a cellincluding a gate protection element is added to or replaced for thespecified node.
 3. The method according to claim 1, wherein theinput/output circuit unit is a transistor.
 4. A method for designing asemiconductor integrated device, comprising the steps of: obtaining afirst cell for which connection information is modified by using acomputer so as to short circuit a first element having a connectionterminal coupled to first power supply wiring and replacing the firstelement with the first cell; obtaining a second cell for which theconnection information is modified so as to short circuit an elementhaving a connection terminal coupled to second power supply wiring andreplacing the second element with the second cell; providing differentnames respectively to the first power supply wiring and the second powersupply wiring; determining a node where terminals provided with thedifferent names are short circuited; specifying the node as an elementto which signals are inputted from the first power supply wiring and thesecond power supply wiring; specifying an input/output circuit unit forexchanging the signals between the first power supply wiring and thesecond power supply wiring; and performing predetermined elementmodification concerning the specified node and the input/output circuitunit according to a predetermined placement rule that allows anelectrostatic discharge surge current path to bypass the specified nodeand the input/output circuit unit.
 5. The method for designing asemiconductor integrated device according to claim 4, wherein a cellincluding a gate protection element is added to or replaced for thespecified node.
 6. The method according to claim 4, wherein theinput/output circuit unit is a transistor.
 7. A computer-readablestorage medium storing a computer program, executable by at least oneprocessor, for designing a semiconductor integrated device, the computerprogram stored on the computer-readable storage medium comprising:executable code that modifies connection information so as to shortcircuit a first element having a connection terminal coupled to firstpower supply wiring; executable code that modifies the connectioninformation so as to short circuit a second element having a connectionterminal coupled to second power supply wiring; executable code thatprovides different names respectively to different power pads in thefirst power supply wiring and the second power supply wiring; executablecode that determines a node where terminals provided with the differentnames are short circuited; executable code that specifies the node as anelement to which signals are inputted from the first power supply wiringand the second power supply wiring; executable code that specifies aninput/output circuit unit for exchanging the signals between the firstpower supply wiring and the second power supply wiring; and executablecode that performs predetermined element modification concerning thespecified node and the input/output circuit unit according to apredetermined placement rule that allows an electrostatic dischargesurge current path to bypass the specified node and the input/outputcircuit unit.
 8. The computer-readable storage medium according to claim7, wherein the input/output circuit unit is a transistor.